Linearly polarized arrays are also provided by changing slot array arrangement. The feeding structures are given by a coaxial probe and cavity resonators, which is presented in detail. The applications of radial line slot antennas are satellite communication antenna, plasma etching, and high power use. This chapter also describes these ... Impact of static magnetic fields on the radial line slot ... The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies. Large volume diffusion plasmas, of which the radial line slot antenna source is one type, must overcome transport effects or diffusion modes that tend to ... Design of Radial Line Slot Antennas at 8.3 GHz for Large ... The Japan Society of Applied Physics (JSAP) serves as an academic interface between science and engineering and an interactive platform for academia and the industry. JSAP is a "conduit" for the transfer of fundamental concepts to the industry for development and technological applications. JSAP was ... Characteristics of large-diameter plasma using a radial ... Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and numerical simulations. Some unique characteristics have been found, including excellent critical radial plasma uniformity, low electron temperature under various pressure conditions, the main plasma generation area of RLSA being limited in the ...
Measurement of the electron temperature on microwave surface…
source reconstruction of a K-band radial line slot antenna (RLSA), and measured results are presented, compared with the designed data. Of course, this algorithm can be also be used for other kind of antennas as patch arrays. 1. Introduction One of the important parameters in antenna diagnosis is the field distribution on the antenna aperture. Large-area plasma excitation in densely arrayed radial line ... A novel feeding structure using a TE 11 (transverse electric) rotating mode in a radial line slot antenna for plasma production is proposed. Moreover, novel slot patterns with different coupling slot distributions are fabricated and tested. Extremely uniform plasma over a large diameter is observed ... Design of Radial Line Slot Antennas at 8.3 GHz for Large Area ... A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source with a narrow process space. A RLSA with paired slots arrayed concentrically on its aperture is designed and applied to a plasma process system which does not need a magnetic field. A tunable microwave slot antenna based on graphene - osti.gov The radial line slot antenna plasma source is a high-density microwave plasma source comprising a high electron temperature source region within the plasma skin depth from a coupling window and low electron temperature diffusion region far from the window.
Design of Radial Line Slot Antennas at 8.3 GHz for Large Area ...
Figure 7. Vth distributions of p‐Mosfets fabricated by applying (a) conventional plasma processes and (b) radial line slot antenna plasma processes plotted for antenna ratio of 23, 100, 1000, and 10,000. Radioengineering - December 2014, Volume 23, Number 4 Borowiec, R. , Kucharski, A. A. , Slobodzian, P. M. Slot excited dielectric resonator antenna above a cavity analysis and experiment. Mast radiator - Wikipedia
Design of a Concentric Array Radial Line Slot Antenna for High-Power ...
For example, Patent Document 1, RLSA (Radial Line Slot Antenna) system is disclosed, which is one of a microwave plasma processing apparatus. In RLSA device, disc-shaped dielectric window is provided in the ceiling surface of the processing chamber. Research - 東京工業大学 Our research themes are planar slotted waveguide antennas and electromagnetic theory. ... Plasma Etching. ... collaboration with TOKYO ELECTRON (TEL) SSPS * *SSPS: Space Solar Power System. A Radial Line Slot Antenna Fed by a Rectangular Waveguide through a Crossed Slot (5.8GHz, 23dBi, 300W) collaboration with IHI and Kyoto University. Multiphysics Coupling Simulation of Silicon Nitride CVD ... The plasma produced by a radial line slot antenna (RLSA) source is discussed based on a simulation using a multiphysics coupled 2D fluid model. The technological aspects in a silicon nitride chemical vapor deposition (CVD) process using a disilane and ammonia mixture are addressed.
Atmospheric Pressure Plasma Research Papers - Academia.edu
Sep 5, 2013 ... Plasma etching, a revolutionary extension of the technique of physical ..... chamber with a radial-line slot antenna, utilizing a 2.45GHz.
Measurement of the electron temperature on microwave surface… Electron temperature measurement in a slot antenna 2.45 GHz microwave plasma source. Journal of Vacuum Science & Technology B [IF: 1.31].Characteristics of Pulsed Surface Wave Oxygen Plasma Generated by Ring- Slot Antenna. Radial Line Slots Array Antenna (RLSA) Performance based… Description. This paper suggests the importance of dielectrics materials in the optimization of RLSA antennas. Simulations of Ku band (11-14) GHz 20 degree beam squinted RLSA designs on CST 2010 using different dielectric constants between ?r= 1.4 and ?r = 3.0 is done in this submission. Antenna and plasma processing apparatus - tokyo electron…